• 专利标题:   Method for observing distribution of wrinkle metal surface of substrate by chemical vapor deposition, involves oxidizing metal with graphite alkene fold, when length of oxidized graphene with substrate is placed under microscope.
  • 专利号:   CN103353276-A, CN103353276-B
  • 发明人:   CHEN Z, WANG B, YU G, ZHANG H, ZHANG Y
  • 专利权人:   SHANGHAI INST MICROSYSTEM INFORMATION, SHANGHAI INST MICROSYSTEM INFORMATION
  • 国际专利分类:   G01B011/00
  • 专利详细信息:   CN103353276-A 16 Oct 2013 G01B-011/00 201402 Pages: 7 Chinese
  • 申请详细信息:   CN103353276-A CN10237684 14 Jun 2013
  • 优先权号:   CN10237684

▎ 摘  要

NOVELTY - The method involves placing the length graphite alkene of metal substrate in oxidizing atmosphere. The metal is oxidized with graphite alkene fold, when the length of the oxidized graphene with metal substrate is placed under observed electron microscope. The metal substrate is made of copper, nickel and nickel alloy. USE - Method for observing distribution of metal surface of substrate by chemical vapor deposition (CVD). ADVANTAGE - The high repeatability of the metal surface of substrate can be ensured. The metal surface of substrate can be operated easily. The fold distribution can be displayed clearly at low magnification optical microscope. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view illustrating the process for observing distribution of wrinkle metal surface of substrate.