• 专利标题:   Controlled disulfide preparation method used for graphene in electronic devices involves atmospheric pressure chemical vapor deposition of tungsten disulfide on silicon dioxide/silicon substrate.
  • 专利号:   CN106811731-A
  • 发明人:   GONG Z, HE D, HE J, WANG Y
  • 专利权人:   UNIV BEIJING JIAOTONG
  • 国际专利分类:   C23C016/02, C23C016/30
  • 专利详细信息:   CN106811731-A 09 Jun 2017 C23C-016/30 201750 Pages: 7 Chinese
  • 申请详细信息:   CN106811731-A CN11013938 17 Nov 2016
  • 优先权号:   CN11013938

▎ 摘  要

NOVELTY - Controlled disulfide preparation method involves atmospheric pressure chemical vapor deposition method of two-dimensional tungsten disulfide on silicon dioxide/silicon substrate where the sulfur source is elemental sulfur, tungsten source is tungsten trioxide powder. USE - Controlled disulfide preparation method used for graphene in electronic devices. ADVANTAGE - Chemical vapor deposition improves growth without the vacuum, thus reducing the process cost.