▎ 摘 要
NOVELTY - The sensor has an insulating substrate (1) i.e. quartz substrate, a gold electrode (2) and a graphene oxide film (3), where the insulating substrate is arranged on a flat surface. The two parallel gold electrodes are vacuum heat evaporated on the insulating substrate to form three insulating grooves. An upper side of the insulating groove is arranged on a graphene oxide film. The gold electrode is connected with the copper wire by silver glue. USE - Humidity sensor based on graphene oxide. ADVANTAGE - The sensor has simple structure, and can use the graphene oxide film as the sensitive material without any reduction treatment, which has rich oxygen-containing functional group, thus providing a large amount of adsorption point for water molecule, and the graphene oxide film is set to be suspended state without being attached to the substrate, such that the upper surface and the lower surface of the film are connected with the water molecule, so as to increase the contact area. The humidity sensor adopts the narrow channel, where electrode distance is 20 microns so as to realize quick response time for about 0.45s and increase sensitivity for about 11 %. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a preparation method of a humidity sensor based on graphene oxide. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a humidity sensor based on graphene oxide. 1insulating substrate 2Gold electrode 3Graphene oxide film