• 专利标题:   Uniform flow heat insulation device for graphene film growth device, has uniform flow cylinder whose inner portion is provided with steering mechanism, where upper end side wall of uniform flow cylinder is connected with air inlet pipe.
  • 专利号:   CN112391604-A
  • 发明人:   YU C
  • 专利权人:   YU C
  • 国际专利分类:   C23C016/26, C23C016/455
  • 专利详细信息:   CN112391604-A 23 Feb 2021 C23C-016/26 202123 Pages: 10 Chinese
  • 申请详细信息:   CN112391604-A CN11275854 16 Nov 2020
  • 优先权号:   CN11275854

▎ 摘  要

NOVELTY - The device has a growth box (1) whose side wall is fixedly connected with a uniform flow cylinder (2). An inner side of the uniform flow cylinder is provided with a uniform flow mechanism (3). An upper end side wall of the uniform flow cylinder is provided with an observation mechanism (4). An inner portion of the uniform flow cylinder is provided with a first steering mechanism (5) and a second steering mechanism (6). An upper end side wall of the uniform flow cylinder is fixedly connected with an air inlet pipe (7). The three snap rings (31) are all fixedly connected to the inner wall of the uniform flow cylinder. The inside of the three snap rings are respectively clamped with a first circular plate (32). USE - Uniform flow heat insulation device for graphene film growth device. ADVANTAGE - The through holes on the surface of the second circular plate and the third circular plate disperse the flowing gas uniformly, thus preventing the quality of the graphene film formed on the surface of the copper foil from being affected. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of uniform flow heat insulation device for graphene film growth device. Growth box (1) Uniform flow cylinder (2) Uniform flow mechanism (3) Observation mechanism (4) First steering mechanism (5) Second steering mechanism (6) Air inlet pipe (7) Three snap rings (31) First circular plate (32)