• 专利标题:   Discrete or vertical power transistor device e.g. metal oxide semiconductor FET, for integrated circuit, has control electrode whose carbon adjoins dielectric opposite to channel region, where control electrode comprises gate electrode.
  • 专利号:   US2022246744-A1, EP4040500-A1, CN114864677-A
  • 发明人:   STORBECK O, SCHULZE H, SCHLOESSER T, MURI I, SIEMIENIEC R, STOBECK O, SCHLOSSER T
  • 专利权人:   INFINEON TECHNOLOGIES AG, INFINEON TECHNOLOGIES AG, INFINEON TECHNOLOGIES AG
  • 国际专利分类:   H01L025/07, H01L029/40, H01L029/49, H01L029/78, B82Y010/00, H01L021/04, H01L021/331, H01L029/06, H01L029/10, H01L029/16, H01L029/739, H01L021/28, H01L021/336, H01L029/423
  • 专利详细信息:   US2022246744-A1 04 Aug 2022 H01L-029/49 202264 English
  • 申请详细信息:   US2022246744-A1 US590685 01 Feb 2022
  • 优先权号:   EP155278

▎ 摘  要

NOVELTY - The device (10) has a semiconductor body (100) comprising a first main surface (101), a second main surface (102) opposite to the first main surface and a transistor cell array (610) provided with a set of transistor cells. A first load electrode is placed over the first main surface, where the first load electrode is electrically connected to the set of transistor cells. A second load electrode is placed over the second main surface, where the second load electrode is electrically connected to the set of transistor cells. The transistor cells comprise a control electrode provided with carbon, where the carbon comprises allotropes single-layered graphene, double-layered graphene, multi-layered graphene, graphenic-like carbon or carbon nanotubes. The carbon of the control electrode adjoins a dielectric opposite to a channel region, where the control electrode comprises a gate electrode. USE - Discrete or vertical power transistor device e.g. insulated gate FET (IGFET) such as metal oxide semiconductor FET (MOSFET) and insulated gate bipolar transistor (IGBT), for an integrated circuit. ADVANTAGE - The device improves electric device characteristics and reduces device manufacturing costs by shrinking device geometries. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for manufacturing a transistor device. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of transistor devices including a trench gate electrode comprising carbon and a shielding region. Discrete or vertical power transistor device (10) Semiconductor body (100) First main surface (101) Second main surface (102) Transistor cell array (610)