• 专利标题:   Method for controllable layer-by-layer removal of graphene layer, involves providing layer of graphene, providing highly graphene-oxidizing agent in hermetic environment and providing heating source for heating graphene layer.
  • 专利号:   US2015310969-A1, US9183971-B1, TW201540664-A, TW531532-B1
  • 发明人:   CHEN W, HSU W, TENG P, CHIU P, HSU W J, TENG P Y, CHIU P W
  • 专利权人:   UNIV NAT TSINGHUA
  • 国际专利分类:   H01B001/04, H01B013/00, H01B013/34, B23K101/40, B23K026/36, C01B031/04, H01L021/28, H01L021/314, H01L021/321, H01L031/0224, H01L033/40
  • 专利详细信息:   US2015310969-A1 29 Oct 2015 H01B-013/34 201573 Pages: 13 English
  • 申请详细信息:   US2015310969-A1 US263310 28 Apr 2014
  • 优先权号:   US263310

▎ 摘  要

NOVELTY - The method involves providing a layer of graphene, and providing a highly graphene-oxidizing agent in a hermetic environment. The heating source is provided for heating graphene layer. The power adjustable laser is provided for defining a pre-determined removal pattern on the graphene layers. The laser power is determined according to the difference between the targeted number of graphene layers and the number of graphene layers remained through a feedback loop controller. The sensor is provided to determine the number of graphene layers remained after portions of the graphene layers removed. USE - Method for controllable layer-by-layer removal of graphene layer. ADVANTAGE - The method involves providing a layer of graphene, and providing a highly graphene-oxidizing agent in a hermetic environment, and thus enables avoiding issues with transferring and exposure to the environment. The efficiency, accuracy and selectivity in the specific number of graphene layers are improved. The quality of the unprocessed regions of grapheme is maintained. DESCRIPTION OF DRAWING(S) - The drawing shows a flow chart of a layer-by-layer removal controllable method.