• 专利标题:   Graphene sensor for registration of gaseous substances comprises dielectric substrate.
  • 专利号:   RU2674557-C1
  • 发明人:   SERGUEI N, LEBEDEV S P, MAKAROV YU N
  • 专利权人:   EPIGRAPH CO LTD
  • 国际专利分类:   G01N027/407
  • 专利详细信息:   RU2674557-C1 11 Dec 2018 G01N-027/407 201910 Pages: 1 Russian
  • 申请详细信息:   RU2674557-C1 RU139071 10 Nov 2017
  • 优先权号:   RU139071

▎ 摘  要

NOVELTY - Use to control the concentration of gas constituents in the atmosphere under different conditions. Summary of the invention consists in that the graphene sensor includes a dielectric substrate made of silicon carbide which is coated with a layer of graphene, a layer of graphene is obtained by sublimation of silicon carbide, contact pads are contacted with a layer of graphene at the ends, for placement of the contact areas are provided grooves made by ion-beam etching. USE - Technological processes. ADVANTAGE - Provided possibility of increasing the sensitivity of the sensor, simplified design, as well as increased service life. 4 cl, 3 dwg