• 专利标题:   Graphene device manufacturing method, involves obtaining substrate, forming negative type or positive type graphene layer on substrate, forming grid regionon graphene layer, and forming inter-layer on graphene layer.
  • 专利号:   CN102376624-A
  • 发明人:   CHEN D, WANG W, ZHAO C
  • 专利权人:   INST MICROELECTRONICS CHINESE ACAD SCI
  • 国际专利分类:   H01L021/768, H01L023/52
  • 专利详细信息:   CN102376624-A 14 Mar 2012 H01L-021/768 201224 Pages: 11 Chinese
  • 申请详细信息:   CN102376624-A CN10250696 11 Aug 2010
  • 优先权号:   CN10250696

▎ 摘  要

NOVELTY - The method involves obtaining a substrate. A negative type or positive type graphene layer is formed on the substrate. A grid region is formed on the graphene layer. A grid region is provided with a metal electrode. An inter-layer is formed on the graphene layer. A contact plug is fixed to the graphene layer. The contact plug is provided with a nano level catalytic metal particle and a carbon nano transistor. A curing agent layer is formed between the nano level catalytic metal particle and the carbon nano transistor. A contact hole is formed in the graphene layer. USE - Method for manufacturing a graphene device (claimed). DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a graphene device manufacturing method. '(Drawing includes non-English language text)'