• 专利标题:   High-electron-mobility transistor (HEMT) device e.g. heterojunction, field-effect transistor (FET), has epitaxial layer set at specific interval with source electrode and drain electrode, where source electrode and the drain electrode are provided with grid electrode.
  • 专利号:   CN115863423-A
  • 发明人:   JIN Y, ZOU G, XU Y, LIAN T
  • 专利权人:   XIAMEN SANAN INTEGRATED CIRCUIT CO LTD
  • 国际专利分类:   H01L021/335, H01L023/31, H01L023/367, H01L029/778
  • 专利详细信息:   CN115863423-A 28 Mar 2023 H01L-029/778 202332 Chinese
  • 申请详细信息:   CN115863423-A CN11654144 22 Dec 2022
  • 优先权号:   CN11654144

▎ 摘  要

NOVELTY - The device has a substrate, where an epitaxial layer is arranged on the substrate. The epitaxial layer is set at specific interval with a source electrode and a drain electrode, where the source electrode and the drain electrode are provided with a grid electrode. The epitaxial layer is provided with a heat conducting piece located at two sides of the grid electrode. A side of the substrate away from the epitaxial layer is provided with a grounding metal layer. The active region of the device penetrates through the substrate and the epitaxial layer is provided with at least one heat conducting column. Two ends of the heat conducting column are connected with the grounding metal layer and the heat conducting piece. USE - High-electron-mobility transistor (HEMT) device e.g. heterojunction, field-effect transistor (FET). ADVANTAGE - The radiating effect of HEMT device can be improved by increasing the side radiation. The heat generated by the grid electrode can be timely conducted to the heat conducting piece, so as to improve the radiating effects of the HEMT device. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a preparation method for HEMT device. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the HEMT device. 10Invention application hemt device 310Source 320Drain electrode 330Gate 340Grounding back hole 410Heat conducting piece 420Heat conducting column