• 专利标题:   Insulating substrate for patterning and directly growing graphene, involves using graphene, which is directly grown on insulating substrate which has graphene growth catalysis by chemical vapor deposition, and mechanism of direct growth.
  • 专利号:   CN107012443-A, CN107012443-B
  • 发明人:   SUN J, XU C, DONG Y, XIE Y, XUN M, PAN G, WANG Q
  • 专利权人:   UNIV BEIJING TECHNOLOGY, UNIV BEIJING TECHNOLOGY
  • 国际专利分类:   C23C016/02, C23C016/26, C23C016/56
  • 专利详细信息:   CN107012443-A 04 Aug 2017 C23C-016/26 201761 Pages: 14 Chinese
  • 申请详细信息:   CN107012443-A CN10246595 16 Apr 2017
  • 优先权号:   CN10246595

▎ 摘  要

NOVELTY - Insulating substrate involves using graphene, which is directly grown on an insulating substrate which has graphene growth catalysis by chemical vapor deposition. The mechanism of direct growth of graphene is layer of copper film is deposited on the insulating substrate, and then a layer of graphene is grown on the copper film by the chemical vapor deposition (CVD). The copper is evaporated by high temperature annealing and the graphene on the insulating substrate, to achieve the purpose of direct growth. The graphite growth mechanism of graphene on the basis of direct growth. USE - Method for insulating substrate for patterning and directly growing graphene (claimed). ADVANTAGE - The method enables to insulate substrate, which has large scale mass production of graphene, and is process in simple and cost-effective manner. DETAILED DESCRIPTION - Insulating substrate involves using graphene (1), which is directly grown on an insulating substrate which has graphene growth catalysis by chemical vapor deposition. The mechanism of direct growth of graphene is layer of copper film (2) is deposited on the insulating substrate, and then a layer of graphene is grown on the copper film by the chemical vapor deposition (CVD). The copper is evaporated by high temperature annealing and the graphene on the insulating substrate, to achieve the purpose of direct growth. The graphite growth mechanism of graphene on the basis of direct growth, the first through the photolithography process to change the shape of copper, and copper film on the growth of graphene also has the same shape with the copper film to get the direct growth of graphene. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of insulated substrate. Graphene (1) Copper film (2)