• 专利标题:   Thin film transistor for use in e.g. 3D LCD, has graphene-containing barrier layer formed on channel layer, and source electrode and drain electrode arranged on graphene-containing barrier layer and made of basic material.
  • 专利号:   KR2013129506-A, KR1346612-B1
  • 发明人:   AHN J, LEE J E
  • 专利权人:   UNIV SUNGKYUNKWAN RES BUSINESS FOUND
  • 国际专利分类:   H01L021/336, H01L029/786
  • 专利详细信息:   KR2013129506-A 29 Nov 2013 H01L-029/786 201402 Pages: 26
  • 申请详细信息:   KR2013129506-A KR053411 21 May 2012
  • 优先权号:   KR053411

▎ 摘  要

NOVELTY - The transistor has a graphene-containing barrier layer formed on a channel layer. A source electrode and a drain electrode are arranged on the graphene-containing barrier layer and made of basic material. The channel layer is made of oxide semiconductor material that is selected from one among zinc indium oxide, zinc oxide, indium gallium oxide and cadmium zinc oxide material. The basic material is selected form one among gold, silver, aluminum, copper and zinc materials. A top gate electrode is arranged on an insulating layer that is formed on the channel layer. USE - Thin film transistor for use in a 3D LCD and an AMOLED screen display. ADVANTAGE - The transistor can prevent formation of an oxide layer in an aluminum-indium gallium zinc oxide interface by inserting the graphene-containing barrier layer between the channel layer and a metal electrode. The transistor provides stable ohmic conduct of the aluminum-indium gallium zinc oxide channel during high temperature annealing period. The transistor improves performance of an AMOLED screen display and a 3D LCD by using high conductivity metal in the aluminum-indium gallium zinc oxide interface. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a thin film transistor manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a cross sectional view of a thin film transistor.