• 专利标题:   Layer-by-layer growing of asymmetrical oxygen and sulfur channels with planar structure to achieve AB-stacked double-layer graphene by growing single-layer graphene film on copper foil, etching, and diffusing gaseous carbon in solid copper.
  • 专利号:   CN110422841-A
  • 发明人:   SUN Z, LIU B
  • 专利权人:   UNIV FUDAN
  • 国际专利分类:   C01B032/186, H01L021/328, H01L029/06
  • 专利详细信息:   CN110422841-A 08 Nov 2019 C01B-032/186 201999 Pages: 9 Chinese
  • 申请详细信息:   CN110422841-A CN10649347 18 Jul 2019
  • 优先权号:   CN10649347

▎ 摘  要

NOVELTY - Asymmetrical oxygen and sulfur channels with a planar structure are grown layer-by-layer to achieve AB-stacked double-layer graphene, by (1) growing single-layer graphene film on both surfaces of copper foil and covering with protective layer on one side of copper foil; (2) engraving other side of copper foil with plasma to etch away single-layer graphene film and oxidize copper to form oxygen-rich surface of cuprous oxide, where top-down structure is single-layer graphene film/copper/cuprous oxide, or thermally depositing layer of sulfur to form sulfur-rich surface, where top-down structure is single-layer graphene film/copper/sulfur; and (3) continuing to use chemical vapor deposition on surface of growth substrate, pyrolyzing gaseous carbon source to generate carbon atoms, diffusing in solid copper, and transferring to single-layer graphene film, where 2nd layer of graphene is precipitated by AB stacking method, and AB-stacked double-layer graphene film is finally formed. USE - A layer-by-layer growth method for asymmetrical oxygen and sulfur channels with a planar structure to achieve AB-stacked double-layer graphene. ADVANTAGE - The method is controlled step by step, the operation is simple, and the repeatability is good, which is conducive to large-scale promotion. The coverage of the prepared double-layer graphene film reaches 95%, and the ratio of the AB stacking method reaches 99%. DETAILED DESCRIPTION - Asymmetrical oxygen and sulfur channels with a planar structure are grown layer-by-layer to achieve AB-stacked double-layer graphene, by (1) growing single-layer graphene film on both surfaces of electrochemically polished copper foil by chemical vapor deposition, and covering with protective layer on one side of copper foil; (2) engraving other side of copper foil with plasma using low-pressure normal-temperature air plasma technology to etch away single-layer graphene film and oxidize copper on this side to form oxygen-rich surface of cuprous oxide, where top-down structure is single-layer graphene film/copper/cuprous oxide, or thermally depositing layer of sulfur using hydrogen plasma technology after reducing oxygen-rich copper surface to form sulfur-rich surface, where top-down structure is single-layer graphene film/copper/sulfur, obtaining a planar structure containing asymmetric oxygen or sulfur channel growth substrate; and (3) continuing to use chemical vapor deposition on oxygen-rich or sulfur-rich surface of growth substrate, pyrolyzing gaseous carbon source to generate carbon atoms, diffusing carbon atoms in solid copper, and transferring to single-layer graphene film, where 2nd layer of graphene is precipitated by AB stacking method, and AB-stacked double-layer graphene film is finally formed.