▎ 摘　　要

NOVELTY - The micro structure (10) has a supporting unit (200) that is arranged on the surface of a base (100). A graphene unit (400) is formed covering a portion of the supporting unit and a portion of an empty space (300) that is adjacent to the supporting unit. A structure unit (500) is arranged on a portion of the graphene unit over the supporting unit. USE - Micro structure used in micro electro mechanical system (MEMS). ADVANTAGE - The micro structure has a structure unit that is arranged on a portion of the graphene unit over the supporting unit so that the micro structure can be formed in various shapes by a simple process without forming a sacrificial layer. Since the graphene unit is transparent, the alignment process can be easily performed. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for method of manufacturing micro structure. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic cross-sectional view of the micro structure. Micro structure (10) Base (100) Supporting units (200) Empty space (300) Graphene (400) Structure unit (500)