▎ 摘　　要

NOVELTY - The device (100) has a support such as dielectric spacer (116) having a cavity (128) and a membrane that is extended over the cavity of the support and is partially reinforced by graphene. The membrane comprises poly silicon and a suspension area of the membrane is reinforced by graphene. The support is arranged on a back plate unit between adjacent conductive perforated back plate portions. A first electrode arranged in contact with back plate unit and a second electrode arranged in contact with the membrane. The conductive back plate unit is arranged to extend over the substrate. USE - Micro electromechanical system device such as MEMS microphone for implementing sensors and acoustic actuators. ADVANTAGE - The graphene layer is electrically conductive and the enhanced construction improves the variable capacity sensor. The change of pressure of the environment of the MEMS pressure sensor will lead to a displacement of the membrane that can be sensed capacitively. The graphene for generates microphone membranes of very high compliance and large fracture strength, thus allowing a design of highly sensitive microphones being robust against large stroke displacement. The membrane sticking is prevented during the manufacturing process. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for manufacturing a MEMS device. DESCRIPTION OF DRAWING(S) - The drawing shows the cross-sectional view of a MEMS device. MEMS microphone (100) Dielectric spacer (116) Graphene layers (120,121) Arrow (126) Support cavity (128)