▎ 摘　　要

NOVELTY - The sensor has an annular metal electrode and a graphene film orderly arranged on a substrate. The graphene film covers a hollow cavity of an annular metal electrode. An edge of the graphene film is fixed on the annular metal electrode. The annular metal electrode is selected from a metal gold, metal silver, metal platinum, metal palladium and metal iridium or alloy formed. USE - Tunneling type MEMS air pressure sensor. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for the following: (1) a method for using tunneling MEMS air pressure sensor; and (2) an application of the tunneling MEMS air pressure sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a tunneling type MEMS air pressure sensor.