• 专利标题:   Method for fabricating visibly transparent UV photodetector of e.g. sunglass, involves laying graphene electrode onto unmasked section of block with end of electrode, where electrode is formed of carbon-based single-layer material.
  • 专利号:   US10475948-B1, US2019371955-A1
  • 发明人:   FARMER D, HAN S
  • 专利权人:   INT BUSINESS MACHINES CORP
  • 国际专利分类:   H01L031/0224, H01L031/0296, H01L031/0352, H01L031/101, H01L031/18
  • 专利详细信息:   US10475948-B1 12 Nov 2019 H01L-031/101 201989 Pages: 11 English
  • 申请详细信息:   US10475948-B1 US994510 31 May 2018
  • 优先权号:   US994510

▎ 摘  要

NOVELTY - The method involves laying a first graphene electrode onto a substrate surface (1001), where the first electrode is formed of a carbon-based single-layer material. A block is patterned over an end of the first electrode and portions of the substrate surface (1004), where the block is formed of a visibly transparent material that is deposited into the block at 75 degree Celsius to 125 degree Celsius. A section of the block and exposed sections of the first electrode are masked (1006). A second graphene electrode is laid onto an unmasked section of the block with an end of the second electrode laid onto the substrate surface (1007), where the second electrode is formed of the carbon-based single-layer material. USE - Method for fabricating a visibly transparent UV photodetector of a sunshade device e.g. sunglass and optical element. ADVANTAGE - The method enables controlling chemical reactants provided by source gases and setting system parameters in an epitaxial deposition process, so that depositing atoms arrive at a deposition surface of a semiconductor substrate with sufficient energy to move about on the deposition surface, thus allowing the depositing atoms to be orient to crystal arrangement of atoms of the deposition surface. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a visibly transparent UV photodetector. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a method for fabricating a visibly transparent UV photodetector. Step for laying first graphene electrode onto substrate surface (1001) Step for depositing conductive contact onto end of graphene electrode (1002) Step for patterning block over end of first electrode and portions of substrate surface (1004) Step for masking section of block and exposed sections of first electrode (1006) Step for laying second graphene electrode onto unmasked section of block (1007)