• 专利标题:   Heat insulation device of graphene thin film growing device, has upper uniform thermal baffle provided with ventilation hole, annular lug boss, inner ring, lower uniform thermal baffle, flange, rotating plate and rotating locking plate.
  • 专利号:   CN206591179-U
  • 发明人:   DUAN Y, HUANG D, LI X, LI Z, SHI H, WU J, YU J, ZHANG Y
  • 专利权人:   CHONGQING GRAPHENE TECH CO LTD
  • 国际专利分类:   C23C016/26, C23C016/455
  • 专利详细信息:   CN206591179-U 27 Oct 2017 C23C-016/455 201777 Pages: 8 Chinese
  • 申请详细信息:   CN206591179-U CN20306621 27 Mar 2017
  • 优先权号:   CN20306621

▎ 摘  要

NOVELTY - The utility model claims a multilayer, and can be adjusted on two adjacent layers of uniform ventilation hole staggered for uniform heat insulation device of the graphene thin film growth device. the uniform heat insulation device, comprising at least two layer uniform, the uniform upper is provided with a ventilation hole; the even lower surface is provided with an annular lug boss, the uniform plate orderly distributed from upper below; the adjacent two layers of uniform annular lug boss and lower uniform outer circumferential surface of the heat plate are rotatably matched; the uniform uniform annular lug boss in the lowest layer is provided with a flange; the annular lug boss of each uniform uniform insulation above the lowermost layer of the upper extends to the rotating plate are provided with flanges; locking device for locking the rotating plate is set on the flange. using the uniform heat insulation device can make the gas can be uniformly distributed in the process cavity, improves the quality of the product.