• 专利标题:   Microelectronic transistor e.g. a complementary metal oxide semiconductor field effect transistor comprises a formation substrate, a graphene layer, a source region, a drain region, a gate dielectric, a gate, and a structural substrate.
  • 专利号:   US2012074387-A1, WO2012040080-A2, WO2012040080-A3, TW201234608-A, US8785261-B2, TW443839-B1
  • 发明人:   KING S
  • 专利权人:   KING S, INTEL CORP, INTEL CORP
  • 国际专利分类:   H01L021/36, H01L029/66, H01L021/336, H01L029/78, H01L027/088, H01L031/0312, H01L021/00, H01L021/84
  • 专利详细信息:   US2012074387-A1 29 Mar 2012 H01L-029/66 201223 Pages: 17 English
  • 申请详细信息:   US2012074387-A1 US888979 23 Sep 2010
  • 优先权号:   US888979

▎ 摘  要

NOVELTY - The transistor comprises a formation substrate, a graphene layer abutting the formation substrate, a source region (302) abutting the graphene layer, a drain region (304) abutting the graphene layer, a gate dielectric (306) abutting the graphene between the source region and the drain region, a gate abutting the gate dielectric, and a structural substrate abutting the formation substrate. The formation substrate has a lattice structure analogous to (0001) basal plane of graphite. USE - Used as a microelectronic transistor such as a complementary metal oxide semiconductor field effect transistor. ADVANTAGE - The microelectronic transistor can be economically and simply fabricated with high mobility and improved performance and quality. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method of fabricating or forming a transistor. DESCRIPTION OF DRAWING(S) - The diagram shows a schematic view of a transistor formed on a graphene layer. Field effect transistor (300) Source region (302) Drain region (304) Gate dielectric (306) Side wall spacers. (312)