• 专利标题:   Preparation of graphene dendritic crystal on insulating substrate for preparing microelectronic device, involves cleaning insulating substrate, drying, placing in furnace, vacuumizing, heating, passing hydrogen and etching substrate surface.
  • 专利号:   CN108910868-A
  • 发明人:   XU S, LI Y, ZHANG J, SUN L, YU F, WANG J, ZHAO X
  • 专利权人:   UNIV DEZHOU, UNIV SHANDONG
  • 国际专利分类:   C01B032/186
  • 专利详细信息:   CN108910868-A 30 Nov 2018 C01B-032/186 201908 Pages: 10 Chinese
  • 申请详细信息:   CN108910868-A CN10903586 09 Aug 2018
  • 优先权号:   CN10903586

▎ 摘  要

NOVELTY - The preparation method of graphene dendritic crystal involves (1) cleaning an insulating substrate, and blowing to dry, (2) placing the dried substrate in a chemical vapor deposition (CVD) tubular furnace, vacuumizing the tubular furnace, increasing the temperature to 200-300 degrees C, introducing hydrogen, and etching the substrate surface at a constant temperature when the temperature is increased to 800-900 degrees C, (3) slowly increasing the temperature after hydrogen etching, increasing the temperature to 1050-1080 degrees C, and introducing carbon source and hydrogen at constant temperature for graphene growth, and (4) stopping the gas after the growth is completed, cooling to 700-800 degrees C, and naturally cooling to room temperature. USE - Preparation method of graphene dendritic crystal on insulating substrate for preparing microelectronic device (all claimed). ADVANTAGE - The method enables preparation of graphene dendritic crystal with excellent mechanical and electrical performance.