• 专利标题:   Graphene device comprises precursor graphene device and graphene layer in which precursor graphene device comprises insulator layer, metal layer in contact with and covering part of top of insulator layer and carbon layer.
  • 专利号:   US2020373155-A1
  • 发明人:   BUSCH J, LINDAMOOD L
  • 专利权人:   VAON LLC
  • 国际专利分类:   C01B032/184, C01B032/186, H01L021/02, H01L021/28
  • 专利详细信息:   US2020373155-A1 26 Nov 2020 H01L-021/02 202098 Pages: 13 English
  • 申请详细信息:   US2020373155-A1 US988475 07 Aug 2020
  • 优先权号:   US427252P, US988475

▎ 摘  要

NOVELTY - Graphene device comprises a precursor graphene device and a graphene layer, where the precursor graphene device comprises an insulator layer, where at least the top portion of the insulator layer is an electrical insulator, a metal layer in contact with and covering part of the top of the insulator layer, and a carbon layer in contact with the metal layer and on top of the insulator layer, and the graphene layer is in contact with the metal layer and the top of the insulator layer. The device further comprises a passivation layer. The metal comprises cobalt, nickel, rhenium, palladium or platinum. The metal layer comprises titanium or chromium. The passivation layer comprises aluminum trioxide, hafnium dioxide, tantalum pentoxide, zinc oxide, titanium dioxide or silicon dioxide. USE - Used as graphene device.