▎ 摘　　要

NOVELTY - The device has a dielectric layer (4) that is arranged on the upper portion of an insulating layer (6). An electrode layer (5) is arranged between the dielectric layer and the insulating layer. The insulating layer is arranged on a metal substrate (7). The dielectric layer is made of sapphire material. The electrode layer is made of a graphene material. The upper surface of the dielectric layer is uniformly provided with convex points. USE - Electrostatic chuck device of graphene electrode. ADVANTAGE - The thermal conductivity of the electrostatic chuck is effectively improved. The graphene electrode used in the electrostatic chuck does not need to undergo high-temperature sintering together with the ceramic layer. The risk of deformation of the electrode layer is avoided. The stress concentration is avoided. The durability of the electrostatic chuck is improved. The uniformity of electrostatic adsorption force is maintained. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of the electrostatic chuck device of graphene electrode. Dielectric layer (4) Electrode layer (5) Insulating layer (6) Metal substrate (7) Power terminal (8)