▎ 摘　　要

NOVELTY - The method involves forming a first polymer film layer on the sacrificial layer substrate. An electrode wiring (20) is formed by forming a metal layer (S2) on the first polymer film layer and patterned it. The graphene film is transferred to the upper portion. The graphene film is etched to form sensor units. The electrode wiring portion is doped. A second polymer film layer is formed on top. The graphene film leaving only the sensor unit and the sensor unit leg portion is etched. The sacrificial layer is removed to manufacture a tactile sensor (1). The graphene film synthesized by a CVD method and stacked in four layers is transferred. The sensor unit is provided with a temperature sensor (41), a 3-axis force sensor (42), a depth sensor (44), and a moisture sensor (43). The temperature sensor is composed of a fractal structure. The moisture sensor is configured in coplanar structure. USE - Manufacturing method of tactile sensor (claimed) in industries such as apparel, automobiles, and cosmetics, and robot field. ADVANTAGE - The sensor detects pressure, temperature, and moisture conditions related to human touch without distortion, since the graphene-based finger sensor is made of a very thin thickness and is free from the effect of the substrate. The sensor has good durability, repeatability and stable sensor output depending on sweat and humidity environments. The sensor has high utilization in a robot field equipped with high artificial intelligence. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method of manufacturing finger sensor for quantifying tactile data. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the configuration of the electrode wiring and sensor units. Tactile sensor (1) Electrode wiring (20) Temperature sensor (41) Three-axis force sensor (42) Moisture sensor (43) Depth sensor (44) Metal layer (S2)