▎ 摘 要
NOVELTY - The modulator has a substrate layer (1), a sandwich structure, and a metal layer (5) that are formed on a substrate from bottom to top. The sandwich structure includes a lower confinement layer (2), a graphene layer (3), and an upper confinement layer (4) that are arranged in order from bottom to top. The portion of the surface of the graphene layer is provided with a metal film and is used as a ground terminal for applying a voltage. USE - Graphene-based phase modulator. ADVANTAGE - The modulator utilizes the electro-optical tunability of graphene to realize phase adjustment when the incident light wavelength is 1550 nm, and the size of the phase modulator is small, which is conducive to achieving the goal of small size and high integration of optoelectronic devices. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) a method for modulating the phase modulator; and (2) a method for perparing the phase modulator. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic structural diagram of the graphene-based phase modulator. Substrate layer (1) Lower confinement layer (2) Graphene layer (3) Upper confinement layer (4) Metal layer (5)