• 专利标题:   Flexible metal substrate device for growing graphene thin film, has reflective plate that is located on outer peripheral side of heater for reflecting heat chamber in inward direction.
  • 专利号:   CN105088335-A, CN105088335-B
  • 发明人:   CHEN Z, HU B, WU H, WU K, XU W, ZHANG H, ZHANG Y, XI M, YU G
  • 专利权人:   IDEAL ENERGY EQUIP SHANGHAI CO LTD, SHANGHAI INST MICROSYSTEM INFORMATION, SHANGHAI INST MICROSYSTEM INFORMATION
  • 国际专利分类:   C30B025/08, C30B029/02, C30B029/64
  • 专利详细信息:   CN105088335-A 25 Nov 2015 C30B-025/08 201630 Pages: 12 English
  • 申请详细信息:   CN105088335-A CN10196056 09 May 2014
  • 优先权号:   CN10196056

▎ 摘  要

NOVELTY - The device (100) has reaction chamber that is connected with the external cavity. The buffer space is provided between the outer chamber and the inner chamber. The heater (2) is located in the buffer space. The gas is provided for heating the metal substrate (4) in the environment. The heat reflective plate (3) is located on the outer peripheral side of the heater for reflecting heat chamber in inward direction. USE - Flexible metal substrate device for growing graphene thin film. ADVANTAGE - The flexible metal substrate device for growing graphene thin film yields high quality graphene thin film of large size. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a flexible metal substrate method for growing graphene thin film. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the flexible metal substrate device for growing graphene thin film. Heater (2) Heat reflective plate (3) Substrate (4) Quartz lumen (10) Flexible metal substrate device (100)