• 专利标题:   Nonvolatile memory device for neuromorphic apparatus, has gate insulating layer extending in first direction between channel layer and gate electrodes, where each of gate electrodes includes metal-doped graphene.
  • 专利号:   EP4181647-A1, US2023157022-A1, CN116137782-A, KR2023071632-A
  • 发明人:   SHIN K, KIM C, PARK S, KIM H, BYUN K, YUN D, LEE C, LI C, YIN T, PIAO S, JIN C, SHIN K W, PARK S H, KIMHYUNWOO, BYUN K E, JIN Y D, LEE C S
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   H10B043/27, G06N003/063, H01L027/11582, H10B043/20, H10B043/30, H10B043/35
  • 专利详细信息:   EP4181647-A1 17 May 2023 H10B-043/27 202341 Pages: 25 English
  • 申请详细信息:   EP4181647-A1 EP207552 15 Nov 2022
  • 优先权号:   KR158043

▎ 摘  要

NOVELTY - The nonvolatile memory device has a channel layer (315) that is extended in a first direction. Several gate electrodes (312) and several spacers each extends in a second direction crossing the first direction. Several gate electrodes and several spacers are alternately arranged with each other in the first direction. A gate insulating layer (320) is extended in the first direction between the channel layer and several gate electrodes. Several gate electrodes includes a metal-doped graphene. The metal-doped graphene includes a metal particle. The metal particle includes ruthenium, aluminum, titanium, platinum, tantalum, rhodium, infrared spectroscopy and carbon monoxide. USE - Nonvolatile memory device for neuromorphic apparatus (claimed). Can also be used in cellular phone, a digital camera, a portable digital assistant (PDA), a mobile computer device and a stationary computer device. ADVANTAGE - The vertical nonvolatile memory device in which a thickness of one memory cell is reduced to reduce a total thickness of a memory cell string and to increase the number of stacked memory cells. During an erase operation, a tunneling current is decreased where the efficiency of the erase operation is improved. The metal-doped graphene has a high work function and the performance of the vertical nonvolatile memory device is improved. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic cross-sectional view of a structure of a respective memory cell string. 301Substrate 311Insulating spacer 312Gate electrode 315Channel layer 320Gate insulating layer