▎ 摘 要
NOVELTY - Terahertz graphene resonator based on flexible substrate, it relates to terahertz graphite alkene material. This utility model uses the existing terahertz beyond material prepared by the rigid substrate material, because of the problem can not bend into the needed shape to cause the actual receive greatly limit the application. It comprises substrate, flexible substrate, graphene resonator, on substrate in turn set with flexible substrate and resonator layer graphene. This utility model takes graphene resonator on polyimide of the following when photo-etching experiment end, for polyimide and resonator together from silicon chip of peeling off, flexible substrate and terahertz beyond material. Compared with the traditional rigid substrate, it can bend. The resonator is selecting material is single layer graphene, graphene except electric conduction, heat conducting performance is very good, pole low resistivity, electron immigration soon equal speed advantages except, the conductivity can be of active control by external voltage, thus it can very suitable for controlling generation of resonance frequency.