▎ 摘　　要

NOVELTY - Manufacturing (M1) of an electrochemical sensor comprises e.g.: providing a metal layer (102) on donor substrate (100); forming a graphene layer (105) on metal layer; forming a structural layer on graphene layer; separating an intermediate structure that includes structural and graphene layers from donor substrate by removing metal layer; providing a final substrate including first and second electrodes extending on a first side of final substrate; and laminating intermediate structure on first side of final substrate with graphene layer in electrical contact with first and second electrodes. USE - The method is useful for manufacturing an electrochemical sensor which is a pH sensor, and is used in a device (all claimed), where of device is useful in the bio-medical field, for biological analyses. ADVANTAGE - The method: utilizes a resist in laminar form simultaneously which enables transfer of the graphene and lithographic definition of the microfluidic system and preserves the graphene from mechanical stresses as well as the flexibility of the dry resist and its capacity for adhering to substrates of various types enables application of the method, to plastic substrates for providing flexible devices; does not require application of any bonding technique, which might prove harmful for the integrity of the graphene; enables transfer onto substrates of any type, size and shape; and exhibits absence of a strong mechanical action which enables extension of the method to substrates that are brittle, thin or flexible. DETAILED DESCRIPTION - Manufacturing (M1) of an electrochemical sensor, comprises: providing a metal layer (102) on a donor substrate (100); forming a graphene layer (105) on the metal layer; forming a structural layer on the graphene layer; separating an intermediate structure that includes the structural layer and the graphene layer from the donor substrate by removing the metal layer; providing a final substrate including a first electrode and a second electrode extending on a first side of the final substrate; laminating the intermediate structure on the first side of the final substrate with the graphene layer in electrical contact with the first and second electrodes; and forming a fluidic path on the graphene layer by removing selective portions of the structural layer until the graphene layer is reached. INDEPENDENT CLAIMS are also included for: (1) the electrochemical sensor, comprising: a substrate having a first side; a first electrode and a second electrode extending over the first side of the substrate; a graphene layer extending over the first side of the substrate, in electrical contact with the first and second electrodes; a structural layer of dry resist (106), extending on the graphene layer; and a fluidic path extending through a thickness of the structural layer and on the graphene layer; (2) a device, comprising: a substrate; a microfluidic chamber formed on the substrate; and a graphene layer forming a wall of the microfluidic chamber and configured to act as a channel-region of a field-effect transistor; and (3) manufacturing (M2) of an electrochemical sensor, comprising: forming a graphene layer on a metal layer positioned on a donor substrate; laminating a layer of dry resist on the donor substrate over the graphene layer; separating the graphene and dry resist layers from the donor substrate by removing the metal layer from between the donor substrate and the graphene layer; and laminating the graphene and dry resist layers onto a final substrate. DESCRIPTION OF DRAWING(S) - The figure show steps for manufacturing an electrochemical sensor. Wafer (1) Donor substrate (100) Metal layer (102) Graphene layer (105) Layer of dry resist (106)