▎ 摘 要
NOVELTY - Resistive type humidity sensor device comprises: a organic-inorganic hybrid nanocomposite as sensing layer made with graphene type material and transition metal dichalcogenide (TMD); and two electrodes or interdigitated electrodes (IDEs) having a coating of the sensing layer or electrodes deposited on the sensing layer, to measure the change in resistance due to presence of humidity in the atmosphere or any close environment. USE - Used as resistive type humidity sensor device. ADVANTAGE - The resistive type humidity sensor device: is resistive in nature, highly sensitive, very low hysteresis, stable for long time and has simpler structure and is easier to integrate with complementary metal oxide semiconductor technology; is a low power, cost effective and ultrafast humidity sensor as compared to conventional resistive type humidity sensor devices; exhibits excellent response in terms of change in resistance of the material when exposed to humidity, thus providing enhancement in humidity sensing to high proton conductivity due to different oxygen groups present; provides high response and senses large range of humidity with variation in relative humidity percentage, thus exhibiting excellent sensitivity covering wide humidity range coupled with low cost synthesis and resistive sensing making the sensor device better than the conventional humidity sensors; exhibits high response, long term stability and reproducibility; utilizes the nanocomposite made of TMD/graphene like material that are exfoliated separately and then mixed or co-exfoliated or nanocomposites can be made after synthesizing the materials using conventional physical or chemical routes; provides the response time and recovery time that are reasonably fast, both response time to reach and recovery time are within few 10 seconds of seconds; provides the sensor performance that is repeatable even after few months of the first measurement; and is operated at room temperature and no separate heaters are required for operation at room temperature. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a fabrication method for making the resistive type humidity sensor device, comprising synthesizing nanomaterials of transition metal dichalcogenide (TMD) and making hybrids with graphene like materials comprising graphene or graphene oxide (GO) and/or reduced graphene oxide (RGO) so as to form hybrid nanocomposite of the two class of material, and depositing, by using a deposition technique, where the hybrid nanocomposite on electrodes or depositing the electrodes on the nanocomposite sensing layer.