• 专利标题:   Gas sensor array for detecting presence of parts per billion grade volatile organic compounds, comprises substrate and set of resistive gas sensors formed on substrate, where respective gas sensors in array comprises patterned graphene film.
  • 专利号:   CN106680328-A
  • 发明人:   DONG Y, YANG T, WANG X
  • 专利权人:   UNIV TSINGHUA SHENZHEN GRADUATE SCHOOL
  • 国际专利分类:   B81B007/02, B81C001/00, G01N027/04, G01N027/12
  • 专利详细信息:   CN106680328-A 17 May 2017 G01N-027/04 201745 Pages: 9 Chinese
  • 申请详细信息:   CN106680328-A CN10004842 04 Jan 2017
  • 优先权号:   CN10004842

▎ 摘  要

NOVELTY - A gas sensor array comprises a substrate and a set of resistive gas sensors formed on the substrate, where the respective gas sensors in the array comprises a patterned graphene film disposed on substrate and a polymer film overlying the graphene film, the substrate has patterned array of metal electrodes, the metal electrode array constitus a conductive lead of each gas-sensitive resistor, each of the film type and/or film thickness of the polymer film of the gas sensor is different. USE - Gas sensor array for detecting the presence of parts per billion grade volatile organic compounds. ADVANTAGE - The sensor array detects the presence of parts per billion grade volatile organic compounds with high sensitivity and selectivity. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for preparing gas sensor array.