• 专利标题:   Silicon carbide graphene thin film manufacturing method, involves injecting carbon source gas into vacuum chamber through hydrogen injecting vacuum cavity, maintaining flow rate of hydrogen, and measuring heat preservation and cooling speed.
  • 专利号:   CN104120402-A
  • 发明人:   CHEN Z, WANG Y
  • 专利权人:   SUZHOU HONGJIU AIR HEAT SHIELDING MATERI
  • 国际专利分类:   C23C016/26, C23C016/32, C23C016/52
  • 专利详细信息:   CN104120402-A 29 Oct 2014 C23C-016/32 201504 Pages: 5 Chinese
  • 申请详细信息:   CN104120402-A CN10391805 08 Aug 2014
  • 优先权号:   CN10391805

▎ 摘  要

NOVELTY - The method involves applying ethylene and silicon rubber materials into a carbon source and a silicon source. The silicon rubber materials are coated on a transition metal substrate and a vacuum reaction system. Oxygen gas is removed by an inner cavity under a low vacuum condition. A vacuum degree of the vacuum reaction system is maintained up to 1-500Pa. Carbon source gas is injected into a vacuum chamber through a hydrogen injecting vacuum cavity. Flow rate of hydrogen is maintained. Heat preservation speed and cooling speed are measured. Flow rate of the ethylene is determined. USE - Silicon carbide graphene thin film manufacturing method. ADVANTAGE - The method enables ensuring simple process, low occupying space, very smooth preparation of a graphene thin film, easy controllable, better graphene-containing preparation efficiency and tightly combined functional group of a base body. DETAILED DESCRIPTION - The silicon rubber material is made of a powder material. DESCRIPTION OF DRAWING(S) - The drawing shows a block diagram illustrating a silicon carbide graphene thin film manufacturing method. '(Drawing includes non-English language text)'