• 专利标题:   Silicon micromachined graphene cantilever resonant gyroscope, has first and second graphene resonant beam placed on transfer beam and between lever transmitting portion and frame.
  • 专利号:   CN107101629-A
  • 发明人:   FAN S, LU Y, XING W
  • 专利权人:   UNIV BEIHANG
  • 国际专利分类:   G01C019/56
  • 专利详细信息:   CN107101629-A 29 Aug 2017 G01C-019/56 201772 Pages: 8 Chinese
  • 申请详细信息:   CN107101629-A CN10324290 10 May 2017
  • 优先权号:   CN10324290

▎ 摘  要

NOVELTY - The silicon micromachined graphene cantilever resonant gyroscope has lever transmission portion (3), fixed mass drive block (4) and gyro mass (5) are fixed to glass substrate (1). The lever transmission portion is connected with gyro mass. The left and right portions are symmetrical. The first and second graphene resonant beam (6,7) are placed on transfer beam (2) and between lever transmitting portion and the frame (8). The first graphene and second graphene resonant beams are consistent with geometrical dimensions of first graphene resonant beam, and are completely in vacuum environment. USE - Silicon micromachined graphene cantilever resonant gyroscope. ADVANTAGE - The silicon micromachined graphene cantilever resonant gyroscope has advantage of flexible structure, high breaking strength and high mechanical quality factor of the graphene resonant beam. DESCRIPTION OF DRAWING(S) - The drawing shows a. (Drawing includes non-English language text) Glass substrate (1) Transfer beam (2) Lever transmission portion (3) Fixed mass drive block (4) Gyro mass (5) First graphene resonant beam (6) Second graphene resonant beam (7) Frame (8)