▎ 摘 要
NOVELTY - The silicon micromachined graphene cantilever resonant gyroscope has lever transmission portion (3), fixed mass drive block (4) and gyro mass (5) are fixed to glass substrate (1). The lever transmission portion is connected with gyro mass. The left and right portions are symmetrical. The first and second graphene resonant beam (6,7) are placed on transfer beam (2) and between lever transmitting portion and the frame (8). The first graphene and second graphene resonant beams are consistent with geometrical dimensions of first graphene resonant beam, and are completely in vacuum environment. USE - Silicon micromachined graphene cantilever resonant gyroscope. ADVANTAGE - The silicon micromachined graphene cantilever resonant gyroscope has advantage of flexible structure, high breaking strength and high mechanical quality factor of the graphene resonant beam. DESCRIPTION OF DRAWING(S) - The drawing shows a. (Drawing includes non-English language text) Glass substrate (1) Transfer beam (2) Lever transmission portion (3) Fixed mass drive block (4) Gyro mass (5) First graphene resonant beam (6) Second graphene resonant beam (7) Frame (8)