• 专利标题:   Graphene nanometer belt preparing method, involves coating transition metal substrate with photo-resist, providing single dimensional scale on surface of transition metal substrate, and obtaining limited graphene nanometer belt.
  • 专利号:   CN102254795-A, CN102254795-B
  • 发明人:   CHENG X, WANG Z, XIA C, XU D, YU Y, ZHANG Y
  • 专利权人:   CHINESE ACAD SCI SHANGHAI INST MICROSYST, CHINESE ACAD SCI SHANGHAI MICROSYSTEM
  • 国际专利分类:   B82Y040/00, H01L021/02
  • 专利详细信息:   CN102254795-A 23 Nov 2011 H01L-021/02 201202 Pages: 9 Chinese
  • 申请详细信息:   CN102254795-A CN10174062 24 Jun 2011
  • 优先权号:   CN10174062

▎ 摘  要

NOVELTY - The method involves coating a transition metal substrate with photo-resist, and transferring a photo-resist pattern to a photo-resist layer. The photo-resist layer is utilized as a mask, and carbon ion implantation is performed in the transition metal substrate to form a carbon ion implantation region. The photo-resist layer is removed, and thermal annealing treatment is performed. A single dimensional scale with width close to less than 10 nanometeres is provided on a surface of the transition metal substrate, and limited graphene nanometer belt is obtained. USE - Method for preparing a graphene nanometer belt. ADVANTAGE - The method enables performing carbon ion implantation in a specific angle of ion implantation for preparing graphene nanometer belt with accurate and simple technique and high yield. DETAILED DESCRIPTION - The metal in the transition metal substrate is nickel, ruthenium, iridium, platinum, cobalt or alloy. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a method for preparing a graphene nanometer belt.'(Drawing includes non-English language text)'