▎ 摘　　要

NOVELTY - The sensor has a comprising substrate (1) over which an insulation layer (2) is formed. A portion of insulation layer is etched out to form a cavity. The cavity is covered or closed by thin film (4) of silicon graphene. An antioxidant protective layer (5) is formed on the thin film and the anti-oxidation protective layer edge has two metal electrodes. The two metal electrodes (6) are respectively connected with the conducting wires. USE - Micro-electro-mechanical systems (MEMS) piezoresistive pressure sensor used in pressure detecting device such as biochemical devices to measure pressure inside cardiovascular, intracranial, urethra, and uterus. ADVANTAGE - The manufacturing process is simple, the sensitivity and the reliability are high and the application is more extensive. The manufacturing process is compatible. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for method of manufacturing MEMS piezoresistive pressure sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a three dimensional view of MEMS piezoresistive pressure sensor. Substrate (1) Insulation layer (2) Thin film of silicon graphene (4) Anti-oxidation protective layer (5) Metal electrodE (6)