• 专利标题:   Field effect transistor for use in integrated circuit devices, has source electrode and drain electrode arranged on substrate, gate insulating film for surrounding each of set of channel layers, and gate electrode for surrounding film.
  • 专利号:   US2021296445-A1, KR2021117004-A, CN113497138-A, US11532709-B2
  • 发明人:   SHIN H, CHO Y, SEOL M, LEE M, HYUN L, CHO Y C, SHIN H J, SHEN X, ZHAO L
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   H01L029/24, H01L029/423, H01L029/10, H01L021/02, H01L029/16, H01L029/417, H01L029/786, H01L029/778
  • 专利详细信息:   US2021296445-A1 23 Sep 2021 H01L-029/10 202186 English
  • 申请详细信息:   US2021296445-A1 US203010 16 Mar 2021
  • 优先权号:   KR033310

▎ 摘  要

NOVELTY - Field effect transistor (100) has a source electrode (180) and a drain electrode (190) on a substrate (110) and apart from each other in a direction. A set of channel layers (121,122) is provided on the substrate, where each of the channel layers has ends contacting the source and drain electrodes. The channel layers are spaced apart in another direction away from the substrate. A gate insulating film surrounds each channel layer, and a gate electrode surrounds the film. Each channel layer has two edges extending in a third direction perpendicular to the former direction and the latter direction, where the edges respectively contact the electrodes. The two dimensional semiconductor material comprises graphene, black phosphorus, phosphorene or a transition metal dichalcogenide. The transition metal dichalcogenide comprises metal element and chalcogen element. USE - The field effect transistor is useful in various integrated circuit devices including memory, driving integrated circuit, and logic device. ADVANTAGE - The short channel effect is limited and the channel length is effectively reduced. The space occupied by a transistor provided in the integrated circuit device is drastically reduced to increase the integration of an integrated circuit (IC) device. The size of a transistor is reduced while maintaining performance has been conducted. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of a schematic structure of the field effect transistor. Field effect transistor (100) Substrate (110) Channel layers (121,122) Source electrode (180) Drain electrode (190)