▎ 摘　　要

NOVELTY - The method involves spinning coating of SU-8 2050 based photo resist on a substrate. The SU-8 based photo resist is pre-baked and exposed with UV light under a chrome mask to promote cross-linking in the photo resist film. Post-exposure of film to enhance the rate of the cross-linking reaction and transfer of film to the developer solution for removal of the unexposed parts of the photo resist film to yield uniform SU-8 microstructures, is performed. The SU-8 microstructures obtained in tubular furnace is pyrolyzed, under inert atmosphere to retain the morphology of microstructures on the substrate. Drop-casting of carbon based materials on pyrolyzed the SU-8 microstructures to prepare hierarchical hybrid three dimensional carbon architecture, is performed. USE - Method of producing a hierarchical hybrid three dimensional carbon microelectrode used as anode material, of rechargeable electrochemical cell e.g. battery, fuel cell, sensor, super capacitor and microbattery, and lithium ion battery (all claimed). ADVANTAGE - The three dimensional hybrid carbon microelectrode arrays can provide improved electrochemical performance of the device. The problem of lithium-ion plating is avoided. Low mass loading is provided to achieve high performance of energy storage device. Excellent reversibility with minimal hysteresis loss, over subsequent cycles, and excellent coulombic efficiency are achieved. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) a hierarchical hybrid three dimensional carbon microelectrode; (2) a lithium ion battery; and (3) a rechargeable electrochemical cell. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view illustrating the method of producing a hierarchical hybrid three dimensional carbon microelectrode.