• 专利标题:   Self-alignment based graphene transistor manufacturing method, involves forming first metal layer on substrate, arranging second metal layer on graphene, and connecting self-alignment unit with third metal layer.
  • 专利号:   CN103903987-A, CN103903987-B
  • 发明人:   FENG Z, LI J, LIU Q, WEI C
  • 专利权人:   CHINA ELECTRONICS TECHNOLOGY GROUP CORP, 13TH RES INST CHINA ELECTRONIC SCI TEC
  • 国际专利分类:   H01L021/3105, H01L021/336
  • 专利详细信息:   CN103903987-A 02 Jul 2014 H01L-021/336 201460 Pages: 17 Chinese
  • 申请详细信息:   CN103903987-A CN10113118 25 Mar 2014
  • 优先权号:   CN10113118

▎ 摘  要

NOVELTY - The method involves forming a first metal layer on a substrate (1). A second metal layer is arranged on a graphene (5). A photo-resist image is displayed on the second metal layer. An active area is provided with a source electrode (8). A gate and a drain electrode (9) are connected with a metal electrode. A photo resist cover is provided with a grid mask image through a grid image photo-resist. Corrosion liquid is removed from the second metal layer. A self-alignment unit is connected with a third metal layer (15). USE - Self-alignment based graphene transistor manufacturing method. ADVANTAGE - The method enables providing simple and easy manufacturing steps, effectively avoiding graphene pollution and scattering of substrates and increasing graphene transistor property. DESCRIPTION OF DRAWING(S) - The drawing shows a front view of a self-alignment based graphene transistor. Substrate (1) Graphene (5) Source electrode (8) Drain electrode (9) Third metal layer (15)