• 专利标题:   Method for transferring high-quality chemical vapor deposition-grown monolayers of graphene from copper formation substrates to target substrates, involves transferring graphene layer formed on formation substrate to target substrate.
  • 专利号:   US2016176162-A1, WO2016100418-A1, TW201637870-A, CN107107561-A, KR2017100569-A, EP3233727-A1, JP2018506494-W, US10272647-B2
  • 发明人:   JOHNSON B Y, MAZUMDER P, SONI K K
  • 专利权人:   CORNING INC, CORNING INC
  • 国际专利分类:   B32B017/06, B32B018/00, B32B037/00, B32B037/18, B32B038/00, B32B009/00, C01B031/04, B32B037/26, C01B032/184, B32B038/16, C01B032/186, C23C016/01, C23C016/26, C01B032/182, C01B032/194, H01L051/05, H01L051/30, C23F001/18
  • 专利详细信息:   US2016176162-A1 23 Jun 2016 B32B-017/06 201643 Pages: 17 English
  • 申请详细信息:   US2016176162-A1 US968264 14 Dec 2015
  • 优先权号:   US094584P, US968264

▎ 摘  要

NOVELTY - The method involves forming a graphene layer on a formation substrate. A graphene layer formed on a formation substrate is transferred to a target substrate by contacting a non-pristine surface of the graphene layer with the target substrate with sufficient force to adhere graphene to the target substrate, and separating the formation and target substrates, where the target substrate comprises a material hydrophobic surface including a contact angle of from about 90-150 degrees and a pristine surface of the graphene layer is less than 5 atom percent organic impurities after transferring. USE - Method for transferring high-quality chemical vapor deposition-grown monolayers of graphene from copper formation substrates to target substrates. ADVANTAGE - The method enables rendering wet adhesion energy as high and positive by reducing polarity of a solid substrate and increasing dispersion component. The method enables performing glass surface cleaning process to improve adhesion strength between transferred graphene and glass surface, so that a cleaning and surface treatment procedure can be utilized to remove contaminants present on the surface. The method enables preventing water molecules from permeating between a glass and a graphene/copper stack, thus allowing better contact to be maintained throughout copper etching process. DETAILED DESCRIPTION - The target substrate comprises an inorganic material. The hydrophobic surface comprises a polymer coating that is a silane. The target substrate comprises an inorganic material. An INDEPENDENT CLAIM is also included for an article. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of an article showing adhesion/delamination phenomena at interfaces within copper/graphene/glass stack. Air or vacuum (100) Liquid (110)