• 专利标题:   Vertical cavity surface emitting laser, has first insulating layer, graphene film layer and second insulating layer stacked in sequence manner, and first and second insulating layers stacked on exposed surface of epitaxial laminate.
  • 专利号:   CN111509556-A
  • 发明人:   TIAN Y, LI F, HAN X, DU S
  • 专利权人:   XIAMEN CHANGELIGHT SEMICONDUCTOR TECHNOL
  • 国际专利分类:   H01S005/042, H01S005/183, H01S005/187, H01S005/34
  • 专利详细信息:   CN111509556-A 07 Aug 2020 H01S-005/042 202067 Pages: 11 Chinese
  • 申请详细信息:   CN111509556-A CN10484068 01 Jun 2020
  • 优先权号:   CN10484068

▎ 摘  要

NOVELTY - The laser has a epitaxial stack arranged on a surface of a substrate and provided with a negative type (N-type) distributed Bragg reflector (DBR) layer, a N-Type waveguide confinement layer, a quantum well, a positive type (P-type) wave-guide confinement layer, an oxide layer, a P-type DBR layer and an aluminum gallium arsenide layer. The oxide layer is formed with a dielectric hole. An electrode is laminated on a portion of a surface of the aluminum gallium arsenide layer. A graphene conductive film covers an exposed surface of an epitaxial laminate. A first insulating layer, a graphene film layer and a second insulating layer are stacked in sequence manner. The first insulating layer and the second insulating layer are directly stacked on the exposed surface of the epitaxial laminate. USE - VCSEL. ADVANTAGE - The laser reduces Joule heat to certain extent, thus achieving effect of lowering threshold and increasing gain, and stacks an electrode and a graphene conductive film on the aluminum gallium arsenide layer to increase lateral conductivity. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a vertical cavity surface emitting laser (VCSEL) forming method. DESCRIPTION OF DRAWING(S) - The drawing shows a partial sectional view of a VCSEL.