▎ 摘 要
NOVELTY - A graphene synthesis chamber (100) comprises chamber case (110) in which a substrate (10) comprising a metal thin film is placed, gas supply unit which supplies at least one gas comprising a carbon gas into an inner space of the chamber case, a main heating unit (120) which emits at least one light to the inner space to heat the substrate, and at least one auxiliary heating unit which absorbs the light and emits radiant heat toward the substrate. USE - As graphene synthesis chamber (claimed), for synthesizing graphene. ADVANTAGE - The graphene synthesis chamber allows large grapheme sheets at low cost, and easy thermal control. Since the graphene synthesis chamber uses light having a near-infrared wavelength band, a temperature can be easily controlled, the substrate can be rapidly heated to a temperature needed to synthesize graphene without heating the entire inner space, and a temperature can be uniformly increased irrespective of a position of the substrate. Also, since auxiliary heating units are provided, a sharp increase in temperature can be prevented, the loss of radiant energy can be minimized, a heating time can be reduced, and graphene synthesis efficiency can be improved. DESCRIPTION OF DRAWING(S) - The figure shows cross-sectional view of graphene synthesis chamber. Substrate (10) Graphene synthesis chamber (100) Depressurization units (101, 103) Gas supply unit (102) Gas discharge unit (104) Chamber case (110) First chamber case (111) Second chamber case (112) Main heating unit (120) Lamps (121) Windows (122)