• 专利标题:   Graphene synthesis chamber for synthesizing graphene comprises chamber case in which substrate comprising metal thin film, gas supply unit, main heating unit which emits light to inner space to heat substrate; and auxiliary heating unit.
  • 专利号:   US2012234240-A1, KR2012106020-A, KR2013008854-A, KR1828530-B1, KR1847559-B1, KR2018035749-A, KR1926497-B1
  • 发明人:   WON D, NAM W, WON D K, NAM W S
  • 专利权人:   NPS CORP, SAMSUNG TECHWIN CO LTD, SAMSUNG TECHWIN CO LTD, NPS CORP, HANWHA TECHWIN CO LTD, HANWHA AEROSPACE CO LTD
  • 国际专利分类:   B82Y040/00, C23C016/26, C23C016/455, C23C016/46, B01J019/08, C01B031/02, H01B001/04, B01J003/00, B82B003/00, C01B032/184
  • 专利详细信息:   US2012234240-A1 20 Sep 2012 C23C-016/26 201263 Pages: 24 English
  • 申请详细信息:   US2012234240-A1 US416071 09 Mar 2012
  • 优先权号:   KR023829, KR069490, KR033497

▎ 摘  要

NOVELTY - A graphene synthesis chamber (100) comprises chamber case (110) in which a substrate (10) comprising a metal thin film is placed, gas supply unit which supplies at least one gas comprising a carbon gas into an inner space of the chamber case, a main heating unit (120) which emits at least one light to the inner space to heat the substrate, and at least one auxiliary heating unit which absorbs the light and emits radiant heat toward the substrate. USE - As graphene synthesis chamber (claimed), for synthesizing graphene. ADVANTAGE - The graphene synthesis chamber allows large grapheme sheets at low cost, and easy thermal control. Since the graphene synthesis chamber uses light having a near-infrared wavelength band, a temperature can be easily controlled, the substrate can be rapidly heated to a temperature needed to synthesize graphene without heating the entire inner space, and a temperature can be uniformly increased irrespective of a position of the substrate. Also, since auxiliary heating units are provided, a sharp increase in temperature can be prevented, the loss of radiant energy can be minimized, a heating time can be reduced, and graphene synthesis efficiency can be improved. DESCRIPTION OF DRAWING(S) - The figure shows cross-sectional view of graphene synthesis chamber. Substrate (10) Graphene synthesis chamber (100) Depressurization units (101, 103) Gas supply unit (102) Gas discharge unit (104) Chamber case (110) First chamber case (111) Second chamber case (112) Main heating unit (120) Lamps (121) Windows (122)