• 专利标题:   Apparatus for controlling doping in two dimensional materials such as graphene, has floating electrode that is arranged to control level of doping within channel of two dimensional material.
  • 专利号:   EP3016145-A1, WO2016066897-A1, CA2963860-A1, KR2017084049-A, US2017316941-A1, KR1949669-B1, US10381503-B2
  • 发明人:   BORINI S, COLLI A
  • 专利权人:   NOKIA TECHNOLOGIES OY, EMBERION OY, EMBERION OY
  • 国际专利分类:   H01L029/16, H01L029/40, H01L029/423, H01L029/778, G01J005/04, G01J005/10, H01L021/04, H01L029/786, G01J005/34, H01L031/113, H01L031/119, H01L031/0352
  • 专利详细信息:   EP3016145-A1 04 May 2016 H01L-029/778 201633 Pages: 14 English
  • 申请详细信息:   EP3016145-A1 EP161553 30 Mar 2015
  • 优先权号:   EP191383, EP161553, CA2963860

▎ 摘  要

NOVELTY - The apparatus (1) has at least one charged substrate (3), a channel of a two dimensional material (5) and at least one floating electrode (7A,7C). The floating electrode comprises a first area adjacent the at least one charged substrate, a second area adjacent the channel of two dimensional material and a conductive interconnection (9A) between a first area (10A) and a second area (11A), the first area is larger than the second area. The floating electrode is arranged to control the level of doping within the channel of two dimensional material. USE - Apparatus for controlling doping in two dimensional materials such as graphene used in electronic devices. ADVANTAGE - The insulating material prevents electrical connection between the floating electrode and the channel of two dimensional material. The number of floating electrodes are reduced which are needed as different doping levels is achieved by overlapping respective floating electrodes. The apparatus allows design freedom in the doping profile as the shape of the patterns and the level of doping is controlled through the sizes of the respective areas of a floating electrode. The apparatus with complex doping patterns within a two dimensional material is fabricated easily. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for controlling doping. DESCRIPTION OF DRAWING(S) - The drawing shows the perspective view of an apparatus for controlling doping. Apparatus for controlling doping (1) Charged substrate (3) Two dimensional material (5) Floating electrodes (7A,7C) Conductive interconnection (9A) First area (10A) Second area (11A)