• 专利标题:   Method for preparing high-k gate medium on surface of multi-layer graphene, involves depositing metal oxide thin film on graphene surface by using atom layer depositing method and adopting metal oxide thin film as high-k gate medium layer.
  • 专利号:   CN102856184-A, CN102856184-B
  • 发明人:   WANG H, XIE X, YANG X, ZHANG Y
  • 专利权人:   CHINESE ACAD SCI SHANGHAI MICROSYSTEMS, SHANGHAI INST MICROSYSTEM INFORMATION
  • 国际专利分类:   H01L021/28, H01L021/283
  • 专利详细信息:   CN102856184-A 02 Jan 2013 H01L-021/28 201328 Chinese
  • 申请详细信息:   CN102856184-A CN10385176 11 Oct 2012
  • 优先权号:   CN10385176

▎ 摘  要

NOVELTY - A high-k gate medium preparing method involves preparing a metal thin film on surfaces of two layers or more than two layers of graphene, and introducing a dangling bond on the surface of the graphene. A metal thin film is removed by adopting a chemical corrosion method. The surface of the graphene is cleaned and dried. Water is utilized as an oxidizing agent, and a metal source is used for reaction. A metal oxide thin film is deposited on the surface of the graphene by using an atom layer depositing method, and adopting the metal oxide thin film as a high-k gate medium layer. USE - Method for preparing a high-k gate medium on a surface of a multi-layer graphene. ADVANTAGE - The method enables preparing the uniform and ultrathin high-k gate medium layer by the atom layer depositing method and by the effective introduction of dangling bond into a graphene crystal lattice. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a method for preparing a high-k gate medium on a surface of multi-layer graphene. '(Drawing includes non-English language text)'