▎ 摘　　要

NOVELTY - A multi-pass scanning device comprises a foil material (3) conveying device and a laser scanning device. The foil material conveying device is used for winding and supporting foil material coated with carbon source, and comprises a unreeling machine (1-1), a guide roller (1-3), a winder (1-2), a feedback sensor, and a controller. The laser scanning device comprises a laser and a scanning focusing head (2-2). The controller of the foil material conveying device controls the unreeling machine to pull foil material of the coating carbon source. The foil material is pulled by the guide roller. The feedback of the sensor realizes constant speed and constant tension operation. The laser focuses on the guide roller of the foil material surface, and fast scans along the vertical direction of the material movement, through multiple times of laser scanning. The carbon source of the substrate material surface is gradually formed to porous. USE - The multi-pass scanning device is used for laser-induced graphene. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a scanning method of the device. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of a multi-pass scanning device. Unreeling machine (1-1) Winder (1-2) Guide roller (1-3) Pulse laser beam (2-1) Scanning focusing head (2-2) Foil material (3) Scanning belt (4)