• 专利标题:   Double-layer graphene tunneling FET, has double-layer graphene active area, metal source electrode and drain electrode metal, which are made of different materials, and top gate electrode located in top gate medium layer.
  • 专利号:   CN104241378-A, CN104241378-B
  • 发明人:   HUANG R, WANG J, WU C, ZHAO Y, HUANG Q, ZHU H
  • 专利权人:   UNIV PEKING
  • 国际专利分类:   H01L021/336, H01L029/41, H01L029/43, H01L029/78
  • 专利详细信息:   CN104241378-A 24 Dec 2014 H01L-029/78 201512 Pages: 9 Chinese
  • 申请详细信息:   CN104241378-A CN10458211 10 Sep 2014
  • 优先权号:   CN10458211

▎ 摘  要

NOVELTY - The FET has a bottom gate medium layer (2) located in a bottom gate electrode (1) that is arranged above a double-layer graphene active area (5). The bottom gate medium layer is arranged above a metal source electrode (6). A drain electrode metal (7) is provided in the double-layer graphene active area. The double-layer graphene active area, the metal source electrode and drain electrode metal are made of different materials. A top gate electrode (9) is located in a top gate medium layer (8). USE - Double-layer graphene tunneling FET. ADVANTAGE - The FET has simple preparation process and better tunneling effect. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a double-layer graphene tunneling FET preparation method. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a double-layer graphene tunneling FET. Bottom gate electrode (1) Bottom gate medium layer (2) Double-layer graphene active area (5) Metal source electrode (6) Drain electrode metal (7) Top gate medium layer (8) Top gate electrode (9)