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  • 专利标题:   Carbon chemical adsorbing useful for preparing of graphene thin film by atom layer deposition, comprises forming covalent bond with an atom on surface of a substrate by forming a substance containing carbon atoms having unbounded electrons.
  • 专利号:   CN101979707-A, CN101979707-B
  • 发明人:   LIU J, RAO Z, XIA Y
  • 专利权人:   INST MICROELECTRONICS CHINESE ACAD SCI, JIAXING MICROELECTRONIC INSTR EQUIP EN
  • 国际专利分类:   C23C016/26
  • 专利详细信息:   CN101979707-A 23 Feb 2011 C23C-016/26 201134 Pages: 6 Chinese
  • 申请详细信息:   CN101979707-A CN10546604 16 Nov 2010
  • 优先权号:   CN10546604

▎ 摘　　要

NOVELTY - Carbon chemical adsorbing, comprises forming covalent bond with an atom on surface of a substrate by forming a substance containing carbon atoms having unbounded electrons to realize stable chemical adsorbing. USE - The method is useful for preparing of graphene thin film by atom layer deposition. ADVANTAGE - The method is simple and easy to carry, and can realize stable chemical adsorbing.