• 专利标题:   Graphene nano pattern processing method, involves forming manual defect hole on graphene, performing anisotropic etching on graphene by utilizing hydrogen-containing plasma, and arranging hole in lattice diagram.
  • 专利号:   CN102358614-A
  • 发明人:   ZHANG L, ZHANG G, SHI Z, YANG R, SHI D
  • 专利权人:   CHINESE ACAD SCI PHYSICS INST
  • 国际专利分类:   B81C001/00
  • 专利详细信息:   CN102358614-A 22 Feb 2012 B81C-001/00 201236 Pages: 12 Chinese
  • 申请详细信息:   CN102358614-A CN10321806 20 Oct 2011
  • 优先权号:   CN10321806

▎ 摘  要

NOVELTY - The method involves forming a manual defect hole on graphene. Anisotropic etching is performed on the graphene by utilizing hydrogen-containing plasma. The hole is arranged in a triangular or rectangular shaped lattice diagram. The hole is formed by photo etching, nano pressing, mechanical impacting and laser scanning. The hydrogen-containing plasma is applied to the graphene during anisotropic etching such that the hole is gradually increased until needed pattern is formed, where reaction temperature ranges from room temperature to 520 degrees centigrade. USE - Method for processing graphene nano pattern. ADVANTAGE - The method enables controllably processing a graphene nano structure with precision up to ten nanometres. The method enables obtaining the graphene nano structure with a zigzag edge structure with smooth atom level. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic illustration of a method for processing graphene nano pattern.'(Drawing includes non-English language text)'