▎ 摘　　要

NOVELTY - Graphene based microbolometer comprises a thin film (120) of graphene nanoribbon deposited on a substrate (101) between electrical contacts, where the thin film of graphene nanoribbon is tuned to be sensitive to Infrared (IR) radiation in the micron band of 1-12 microns; first and second conductive terminals in electrical communication with the thin film of graphene nanoribbon; and where the thin film of graphene nanoribbon is tuned such that exposure of IR radiation induces a change in impedance between the first and second conductive terminals which is sensed by CMOS readout circuitry; where the thin film of graphene nanoribbon is tuned to increase the sensitivity of the detector by exposing the graphene nanoribbon to an oxidation environment, which increases the thermal coefficient of resistance (TCR) to excess of 4% per degree centigrade and up to 6% per degree centigrade, and resulting in a Noise Equivalent Delta Temperature (NEDT) of less than 10 mK. USE - As graphene based microbolometer. ADVANTAGE - The microbolometer detects light by resistance changes in the fabric due to heating and provides enhanced overall sensitivity. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a graphene based IR detector. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the microbolometer detecting element according to an embodiment employing a graphene sensing element fabricated on a generic CMOS wafer process. Infrared detector (100) Substrate (101) Film (120) Infrared sensor (130)