▎ 摘 要
NOVELTY - Manufacture of a two-dimensional/one-dimensional functional substrate (100) involves supplying a stack comprising a support (111), a thin carbonaceous layer (112), a metallic catalytic layer (113) and a stabilizing layer (114) of metallic oxide having a thickness of 0.5-4 nm, and preferably from 0.5-3 nm, growing a carpet of carbon nanotubes by chemical catalytic vapor deposition from the catalytic layer, through openings formed in the stabilization layer to form a forest of carbon nanotubes, in which an end (E1) is fixed to the catalytic layer which is in contact with the carbonaceous thin layer. USE - Manufacture of two-dimensional/one-dimensional functional substrate used for microelectronic interconnection element, heat exchanger, and electrodes of batteries (all claimed). ADVANTAGE - The method enables manufacture of two-dimensional/one-dimensional functional substrate with excellent thermal conductivity, and electrical conductivity. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) the two-dimensional/one-dimensional functional substrate, which comprises a support, a thin carbonaceous layer preferably of graphene, a catalytic layer preferably of iron, a stabilization layer of metal oxide, preferably silica or alumina, provided with openings and having a thickness of 0.5-4 nm, preferably 0.5-3 nm, and a carpet of carbon nanotubes attached to the catalytic layer through openings in the stabilization layer; (2) use of the two-dimensional/one-dimensional functional substrate as a microelectronic interconnection element, as a microelectronic interposer, as a heat exchanger or as battery electrodes of batteries; and (3) the stack. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view illustrating manufacture of carpet of carbon nanotubes. Two-dimensional or one-dimensional functional substrate (100) Support (111) Thin carbonaceous layer (112) Catalytic layer (113) Stabilization layer (114)