• 专利标题:   Manufacture of two-dimensional/one-dimensional functional substrate used for e.g. batteries, involves supplying stack comprising support, thin carbonaceous layer, metallic catalytic layer and stabilizing layer, and growing carpet of carbon nanotubes from catalytic layer through stabilization layer.
  • 专利号:   WO2021160964-A1, FR3107053-A1, FR3107053-B1
  • 发明人:   RAMOS R, FAUREVINCENT J, TRAN H, RAPHAEL R, JEROME F, HUYNAM T
  • 专利权人:   COMMISSARIAT ENERGIE ATOMIQUE, COMMISSARIAT ENERGIE ATOMIQUE
  • 国际专利分类:   C01B032/16, C01B032/158, B82Y040/00
  • 专利详细信息:   WO2021160964-A1 19 Aug 2021 202170 Pages: 29 French
  • 申请详细信息:   WO2021160964-A1 WOFR050234 10 Feb 2021
  • 优先权号:   FR001337

▎ 摘  要

NOVELTY - Manufacture of a two-dimensional/one-dimensional functional substrate (100) involves supplying a stack comprising a support (111), a thin carbonaceous layer (112), a metallic catalytic layer (113) and a stabilizing layer (114) of metallic oxide having a thickness of 0.5-4 nm, and preferably from 0.5-3 nm, growing a carpet of carbon nanotubes by chemical catalytic vapor deposition from the catalytic layer, through openings formed in the stabilization layer to form a forest of carbon nanotubes, in which an end (E1) is fixed to the catalytic layer which is in contact with the carbonaceous thin layer. USE - Manufacture of two-dimensional/one-dimensional functional substrate used for microelectronic interconnection element, heat exchanger, and electrodes of batteries (all claimed). ADVANTAGE - The method enables manufacture of two-dimensional/one-dimensional functional substrate with excellent thermal conductivity, and electrical conductivity. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) the two-dimensional/one-dimensional functional substrate, which comprises a support, a thin carbonaceous layer preferably of graphene, a catalytic layer preferably of iron, a stabilization layer of metal oxide, preferably silica or alumina, provided with openings and having a thickness of 0.5-4 nm, preferably 0.5-3 nm, and a carpet of carbon nanotubes attached to the catalytic layer through openings in the stabilization layer; (2) use of the two-dimensional/one-dimensional functional substrate as a microelectronic interconnection element, as a microelectronic interposer, as a heat exchanger or as battery electrodes of batteries; and (3) the stack. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view illustrating manufacture of carpet of carbon nanotubes. Two-dimensional or one-dimensional functional substrate (100) Support (111) Thin carbonaceous layer (112) Catalytic layer (113) Stabilization layer (114)