• 专利标题:   Alternating grating and graphene composite structure integrated sensor, has silicon dioxide dielectric grating arranged between two adjacent noble metal dielectric gratings, and graphene layer covered on upper surface of silicon dioxide dielectric layer.
  • 专利号:   CN211978689-U
  • 发明人:   ZHAO H, CHENG P, DING Z
  • 专利权人:   UNIV NINGBO TECHNOLOGY
  • 国际专利分类:   G01N021/41
  • 专利详细信息:   CN211978689-U 20 Nov 2020 G01N-021/41 202097 Pages: 8 Chinese
  • 申请详细信息:   CN211978689-U CN20432333 30 Mar 2020
  • 优先权号:   CN20432333

▎ 摘  要

NOVELTY - The utility model claims a sensor with alternating grating and graphene composite structure, comprising: a substrate silicon layer; an aluminium film layer covered on the upper surface of the substrate silicon layer; an alternating grating, covered on the upper surface of the aluminium film layer; the alternating grating comprises a plurality of spaced noble metal dielectric grating; between two adjacent noble metal dielectric grating is formed with a strip-shaped containing space; a silicon dioxide dielectric grating arranged between two adjacent noble metal dielectric gratings and filled with the containing space; a silicon dioxide dielectric layer covered on the upper surface of the alternating grating; and a graphene layer covered on the upper surface of the silicon dioxide dielectric layer. In the utility model, the sensitivity of the environment refractive index based on the left frequency and the narrow pulse is different; using the absorption peak wavelength of the two as the information carrier; by means of the matrix equation, obtaining the refractive index sensing sensitivity for eliminating the temperature influence.