• 专利标题:   Sensing element of sensor, has source electrode and drain electrode that are electrically connected with graphene film, and graphene film and base plate that are provided with cavity.
  • 专利号:   CN104237357-A
  • 发明人:   FANG Y, HOU J, CHENG Z
  • 专利权人:   NAT CENT NANOSCIENCE TECHNOLOGY CHINA
  • 国际专利分类:   G01N027/414, H01L021/336, H01L029/78
  • 专利详细信息:   CN104237357-A 24 Dec 2014 G01N-027/414 201517 Pages: 17 Chinese
  • 申请详细信息:   CN104237357-A CN10231991 09 Jun 2013
  • 优先权号:   CN10231991

▎ 摘  要

NOVELTY - The sensing element has substrate that is fixed with source electrode and a drain electrode. The source electrode and drain electrode are electrically connected with a graphene film. The graphene film and base plate are provided with cavity. USE - Sensing element of sensor (claimed). ADVANTAGE - The conductivity of graphene alkene in sensor can be greatly increased. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) a preparation method of sensing element; and (2) a sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram illustrating the process of forming the sensing element. (Drawing includes non-English language text)