• 专利标题:   Preparing graphene crystal using plasma enhanced chemical vapor deposition device involves placing insulating substrate in synthesis chamber, pumping synthesis chamber to vacuum, introducing growth gas, generating plasma and transversely growing graphene small crystal nucleus on insulating substrate.
  • 专利号:   CN116002672-A
  • 发明人:   MA S, LIU B
  • 专利权人:   JI HUA LAB
  • 国际专利分类:   C01B032/186, C30B025/00, C30B029/02
  • 专利详细信息:   CN116002672-A 25 Apr 2023 C01B-032/186 202345 Chinese
  • 申请详细信息:   CN116002672-A CN11523714 28 Nov 2022
  • 优先权号:   CN11523714

▎ 摘  要

NOVELTY - Preparing graphene crystal using plasma enhanced chemical vapor deposition device comprises placing the insulating substrate in the synthesis chamber, pumping the synthesis chamber to vacuum, introducing growth gas into the synthesis chamber, raising the temperature of the insulating substrate to the preset nucleation temperature, generating plasma by the radio frequency power supply, keeping the preset nucleation temperature preset nucleation time, so that the insulating substrate is generated with graphene small crystal nucleus, adjusting the temperature of the insulating substrate to the preset growth temperature, and keeping the preset growth temperature for preset growth time, so that the graphene small crystal nucleus on the insulating substrate is transversely grown along their own edge as large size graphene crystal. USE - The method is useful for preparing graphene crystal using plasma enhanced chemical vapor deposition device. ADVANTAGE - The method realizes the preparation of large size graphene.